Multi-technique platform for dynamic and static MEMS characterisation

Kay Gastinger; Pål Løvhaugen; Øystein Skotheim; Ola Hunderi

doi:10.1117/12.726307

18 June 2007 Multi-technique platform for dynamic and static MEMS characterisation

Kay Gastinger, Pål Løvhaugen, Øystein Skotheim, Ola Hunderi

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66163K (2007) https://doi.org/10.1117/12.726307
Event: Optical Metrology, 2007, Munich, Germany

Abstract

MEMS characterisation is an important application area for interferometry. In this paper a Mach-Zehnder interferometer configuration is presented that combines both coherent and low coherent techniques in one setup. It incorporates the application of classical Laser Interferometry (LI) and Electronic Speckle Pattern Interferometry as well as classical Low Coherence Interferometry (LCI), full-field Optical Coherence Tomography and Low Coherence Speckle Interferometry. Digital Holography can be applied by minor modifications of the setup. The setup, working principle, and applications of the interferometer will be described. Measurements on a MEMS-based pressure sensor are presented. The sensor consists of a glass wafer attached to a silicon membrane. A cavity is etched into the glass wafer. The wafers are bonded and form a vacuum cavity. Membrane deformations are measured through the window using LI and LCI. LCI provides information about the shape of the glass window. Results from speckle techniques are compared with similar results from plane wave techniques. The influence of the glass window and the illumination of the object are investigated.

Citation Download Citation

Kay Gastinger, Pål Løvhaugen, Øystein Skotheim, and Ola Hunderi "Multi-technique platform for dynamic and static MEMS characterisation", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66163K (18 June 2007); https://doi.org/10.1117/12.726307

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