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Proceedings Article

Experimental validation of 20nm sensitivity of singular beam microscopy

[+] Author Affiliations
Boris Spektor, Alexander Normatov, Joseph Shamir

Technion - Israel Institute of Technology (Israel)

Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661622 (June 18, 2007); doi:10.1117/12.728539
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From Conference Volume 6616

  • Optical Measurement Systems for Industrial Inspection V
  • Wolfgang Osten; Christophe Gorecki; Erik L. Novak
  • Munich, Germany | June 18, 2007

abstract

Quickly developing nanotechnology drives the industrial need for fast but sensitive nano-scale feature detection and evaluation. In this work we bypass the diffraction limit for achieving nanoscale sensitivity by introducing optical singularities into the illuminating beam for a modified laser scanning microscopic architecture. A good correspondence was obtained between laboratory experiments and corresponding simulations that indicated a theoretical potential of 1nm sensitivity under a practical signal to noise ratio of 30dB. For analysis of the experimental and simulation results, two simple but effective algorithms were developed. A significant improvement of signal to noise ratio in the optical system with coherent light illumination can be achieved by utilization a highly redundant data collected during experiments. Our experimental results validate achievable sensitivity down to 20nm. The unique combination of nano-scale sensitivity together with implementation simplicity and on-line, real-time analysis capability make Singular Beam Microscopy a valuable industrial analytic method.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Boris Spektor ; Alexander Normatov and Joseph Shamir
"Experimental validation of 20nm sensitivity of singular beam microscopy", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661622 (June 18, 2007); doi:10.1117/12.728539; http://dx.doi.org/10.1117/12.728539


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