High precision sensing system for vibration distribution measurement

Guotian He; Chaowei Tang; Lijuan Zhao; Mingyi Fu

doi:10.1117/12.783822

17 January 2008 High precision sensing system for vibration distribution measurement

Guotian He, Chaowei Tang, Lijuan Zhao, Mingyi Fu

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235T (2008) https://doi.org/10.1117/12.783822
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Aimed at the study actuality of displacement distribution measurement of each point on the surface in the micro- motion status, a new vibration displacement distribution interferometry combining sinusoidal phase-modulating(SPM) with Fourier transform is proposed in the paper, its principle and the influence on the measuring precision caused by noise is analyzed in theory. The corresponding interferometer adopting this technique above mentioned was developed The interferometer can be applied into vibration measurement, and vibration distribution measurement. By measuring a mirror's microvibration, the vibration distribution measurement was realized, its repeatable measuring precision was 5.61nm. Experimental results validated the feasibility of the interferometer.

Citation Download Citation

Guotian He, Chaowei Tang, Lijuan Zhao, and Mingyi Fu "High precision sensing system for vibration distribution measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235T (17 January 2008); https://doi.org/10.1117/12.783822

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KEYWORDS

Interferometers

Interferometry

Charge-coupled devices

CCD image sensors

Fourier transforms

Image sensors

Scanning probe microscopy

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