Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

A. Polo; N. van Marrewijk; S. F. Pereira; H. P. Urbach

doi:10.1117/12.916154

23 March 2012 Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

A. Polo, N. van Marrewijk, S. F. Pereira, H. P. Urbach

Author Affiliations +

Proceedings Volume 8322, Extreme Ultraviolet (EUV) Lithography III; 832219 (2012) https://doi.org/10.1117/12.916154
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

A Hartmann Wavefront Sensor (HWS) is used as a tool to measure phase aberration at the EUV wavelength. Nevertheless, a conventional HWS measures only the wavefront slope in each sub-aperture and is not able to measure the phase structure inside it. This leads to an accuracy loss in the aberration reconstruction. In this work a phase retrieval algorithm is applied to the intensity pattern data in order to reconstruct the phase feature inside the sub-aperture and hence improve the accuracy. Experimental data confirms our simulations making this technique feasible regarding both the achieved accuracy and computational time. The phase information can be used to develop an adaptive optics system dedicated to a EUV stepper.

Citation Download Citation

A. Polo, N. van Marrewijk, S. F. Pereira, and H. P. Urbach "Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 832219 (23 March 2012); https://doi.org/10.1117/12.916154

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