Design review of a multiwavelength, three-dimensional scatterometer

Fredrick M. Cady; John C. Stover; Donald R. Bjork; Marvin L. Bernt; Mary W. Knighton; Daniel J. Wilson; Daniel R. Cheever

doi:10.1117/12.22658

1 December 1990 Design review of a multiwavelength, three-dimensional scatterometer

Fredrick M. Cady, John C. Stover, Donald R. Bjork, Marvin L. Bernt, Mary W. Knighton, Daniel J. Wilson, Daniel R. Cheever

Author Affiliations +

Proceedings Volume 1331, Stray Radiation in Optical Systems; (1990) https://doi.org/10.1117/12.22658
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A design review of a five wavelength, laser-based, full reflection hemispherical BRDF instrument is given. A source box design which provides full polarization control of incident radiation is described. The receiver design uses a periscope mirror which allows near (< 1 .5°) retroreflection measurements with full received polarization control. Replacement of the periscope mirror with a beam splitter pellicle allows 0° retroreflection measurements. The goniometer design shown allows the measurement of full reflection hemisphere scatter with transmission measurements possible. A new software control approach which allows a user to define scans in scatter space without being concerned with mechanical axes motion is described.

Citation Download Citation

Fredrick M. Cady, John C. Stover, Donald R. Bjork, Marvin L. Bernt, Mary W. Knighton, Daniel J. Wilson, and Daniel R. Cheever "Design review of a multiwavelength, three-dimensional scatterometer", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); https://doi.org/10.1117/12.22658

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