Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography

Dieter Van den Heuvel; Rik Jonckheere; Bart Baudemprez; Shaunee Cheng; Gino Marcuccilli; Andrew Cross; Gregg Inderhees; Paolo Parisi

doi:10.1117/12.916979

3 April 2012 Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography

Dieter Van den Heuvel, Rik Jonckheere, Bart Baudemprez, Shaunee Cheng, Gino Marcuccilli, Andrew Cross, Gregg Inderhees, Paolo Parisi

Author Affiliations +

Proceedings Volume 8324, Metrology, Inspection, and Process Control for Microlithography XXVI; 83240L (2012) https://doi.org/10.1117/12.916979
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Optical bright field wafer inspection followed by repeater analysis is used to find a maximum number of programmed and natural defects on a EUV patterned mask. Each aspect of the inspection methodology affecting the sensitivity of the wafer inspection is optimized individually. A special focus is given to the wafer stack. Simulation is used to predict the optimum stack properties and experimental verification is performed through exposures on the IMEC EUV Alpha Demo Tool. The final result is benchmarked against state-of-the-art patterned mask inspection and blank inspection to evaluate the capabilities and limitations of the optical wafer inspection. In addition, the locations obtained by each inspection technique (wafer and mask) were reviewed on wafer by means of a new automated methodology that is based on a tight stage accuracy of both inspection tool and review SEM.

Citation Download Citation

Dieter Van den Heuvel, Rik Jonckheere, Bart Baudemprez, Shaunee Cheng, Gino Marcuccilli, Andrew Cross, Gregg Inderhees, and Paolo Parisi "Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography", Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 83240L (3 April 2012); https://doi.org/10.1117/12.916979

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