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Proceedings Article

Microfluidic devices for μ -TAS applications fabricated by polymer hot embossing

[+] Author Affiliations
Holger Becker, Wolfram Dietz

Jenoptik Mikrotechnik GmbH (Germany)

Proc. SPIE 3515, Microfluidic Devices and Systems, 177 (September 10, 1998); doi:10.1117/12.322081
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From Conference Volume 3515

  • Microfluidic Devices and Systems
  • A. Bruno Frazier; Chong H. Ahn
  • Santa Clara, CA | September 20, 1998

abstract

Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass- based MEMS technologies. We present in this paper hot embossing as a replication method for planar microstructures based on polymer substrates. Several chips containing microchannels for capillary electrophoresis applications with a range of channel widths between 0.8 micrometers and 100 micrometers have been produced by this method, yielding a very good structural replication and short production times.

© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Holger Becker and Wolfram Dietz
"Microfluidic devices for μ -TAS applications fabricated by polymer hot embossing", Proc. SPIE 3515, Microfluidic Devices and Systems, 177 (September 10, 1998); doi:10.1117/12.322081; http://dx.doi.org/10.1117/12.322081


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