Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

The saga of lambda: spectral influences throughout lithography generations

[+] Author Affiliations
Bruce W. Smith

Rochester Institute of Technology (United States)

Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 83250Z (March 29, 2012); doi:10.1117/12.920025
Text Size: A A A
From Conference Volume 8325

  • Advances in Resist Materials and Processing Technology XXIX
  • Mark H. Somervell; Thomas I. Wallow
  • San Jose, California | February 12, 2012

abstract

In this paper, the progression of optical lithography from a spectral (or wavelength) perspective is presented. The interdependencies between materials, sources, design challenges, and scaling are described relative the needs of semiconductor device generations. Comparisons of materials and approaches for use in the blue-UV, the mid-UV, the deep-UV, and to EUV wavelengths are provided showing the spectral influences for choices made. Inorganic and organic lithography materials, sources of radiation, and incremental wavelength "shrink" are compared for lithography generations from g-line to EUV and beyond.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Bruce W. Smith
"The saga of lambda: spectral influences throughout lithography generations", Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 83250Z (March 29, 2012); doi:10.1117/12.920025; http://dx.doi.org/10.1117/12.920025


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement


  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.