Fabrication of high-quality cavity mirror

Xiongying Fu; Jianyong Wang; Yuanan Zhao; Yuanyuan Gu; Mincai Liu; Zhengxiu Fan

doi:10.1117/12.402763

6 October 2000 Fabrication of high-quality cavity mirror

Xiongying Fu, Jianyong Wang, Yuanan Zhao, Yuanyuan Gu, Mincai Liu, Zhengxiu Fan

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402763
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

The surface of K9 glass substrate whose size is 220x220x40mm³ is polished by bowl-feed polish with polishing agent of ultra pure water combined with cerium dioxide (CeO₂). The super smooth surface with standard rms surface roughness less than 1 nm and reflective wavefront 0.127 λ(p-v) (λ=632.8 nm) was got. The high reflective thin film, whose reflectivity measured by Lambda 19 photometer is more than 99.5% at wavelength 1054 nm for incidence angle 0°, and whose laser induced damage threshold is 26 J/cm² (1054 nm, 1 ns), was coated on this super smooth surface of K9 glass substrate by electronic beam evaporation deposition in the APS1504 coating machine. After alternately coating hafnia (HfO₂) and silicon dioxide (SiO₂) multilayer on the K9 glass substrate surface, this mirror's reflective wavefront is 0.17 λ(p-v) (λ=632.8 nm). The high quality cavity mirror was got.

Citation Download Citation

Xiongying Fu, Jianyong Wang, Yuanan Zhao, Yuanyuan Gu, Mincai Liu, and Zhengxiu Fan "Fabrication of high-quality cavity mirror", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402763

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