Investigation of Pt/Ga2O3-ZnO/SiC Schottky-diode-based hydrocarbon gas sensors

Adrian Trinchi; Yong Xing Li; Wojtek Wlodarski; Saulius Kaciulis; Luca Pandolfi; Sesto Viticoli

doi:10.1117/12.469674

13 November 2002 Investigation of Pt/Ga₂O₃ -ZnO/SiC Schottky-diode-based hydrocarbon gas sensors

Adrian Trinchi, Yong Xing Li, Wojtek Wlodarski, Saulius Kaciulis, Luca Pandolfi, Sesto Viticoli

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.469674
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Silicon carbide based metal-oxide-semiconductor (MOS) devices are attractive for gas sensing in harsh, high temperature environments. We present a novel hydrocarbon gas sensor based on a catalytic Metal-Reactive Insulator-Silicon Carbide (MRISiC) device. This sensor has been employed as a Schottky diode. The sensor presented is capable of operating at temperatures around 600°C. It has been exposed to propene gas, which lowers the barrier height of the diode. The MRISiC devices are based on semiconducting Ga₂O₃ - ZnO thin films prepared by the sol-gel process. The thin films were deposited onto the SiC by the spin coating technique and a Pt layer was deposited on the top of the metal oxide layer forming the Schottky barrier. The sensors responses were stable and repeatable towards propene at operating temperatures between 300 and 600°C. In this paper the effect of biasing is investigated by analyzing the output voltage of the diodes when biased at constant currents of 2 and 8 mA.

Citation Download Citation

Adrian Trinchi, Yong Xing Li, Wojtek Wlodarski, Saulius Kaciulis, Luca Pandolfi, and Sesto Viticoli "Investigation of Pt/Ga₂O₃ -ZnO/SiC Schottky-diode-based hydrocarbon gas sensors", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.469674

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available