Energy coupling to materials ablated by intensive pulsed 1-um radiation: plasma shielding and surface-modification effects

Vitali I. Konov; Serge V. Garnov; Sergei M. Klimentov; Taras V. Kononenko; O. G. Tsarkova; Friedrich Dausinger

doi:10.1117/12.309505

3 June 1998 Energy coupling to materials ablated by intensive pulsed 1-μm radiation: plasma shielding and surface-modification effects

Vitali I. Konov, Serge V. Garnov, Sergei M. Klimentov, Taras V. Kononenko, O. G. Tsarkova, Friedrich Dausinger

Author Affiliations +

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309505
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Optical transmission and reflectivity of ceramics and CVD diamond plates prior, in the process and after ablation by intensive nano- and picosecond pulses of Nd:YAG and Nd:YAP lasers are investigated. Laser induced surface layer modification effects and plasma influence are considered. Correlation between crater depth and plasma optical properties was found. The mechanisms of crater walls influence on plasma are discussed.

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Vitali I. Konov, Serge V. Garnov, Sergei M. Klimentov, Taras V. Kononenko, O. G. Tsarkova, and Friedrich Dausinger "Energy coupling to materials ablated by intensive pulsed 1-μm radiation: plasma shielding and surface-modification effects", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309505

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