X-ray lens with kinoform refractive profile created by x-ray lithography

Leonid Shabel'nikov; Vladimir Nazmov; Franz Josef Pantenburg; Juergen Mohr; Volker Saile; Vecheslav Yunkin; Sergey Kouznetsov; Valery F. Pindyurin; Irina Snigireva; Anatoly A. Snigirev

doi:10.1117/12.455688

21 November 2002 X-ray lens with kinoform refractive profile created by x-ray lithography

Leonid Shabel'nikov, Vladimir Nazmov, Franz Josef Pantenburg, Juergen Mohr, Volker Saile, Vecheslav Yunkin, Sergey Kouznetsov, Valery F. Pindyurin, Irina Snigireva, Anatoly A. Snigirev

Author Affiliations +

Proceedings Volume 4783, Design and Microfabrication of Novel X-Ray Optics; (2002) https://doi.org/10.1117/12.455688
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

X-ray kinoform lenses were proposed earlier as focusing devices with refractive and diffractive properties. Deep X-ray lithography technique was applied to realize kinoform lenses in thick resist layers PMMA. Created lens has rather short focal distance 20 cm at base energy 17.5 keV and full aperture 1.5mm with outermost segments 2 μm in width. Predicted performance of created lens is compared with simple parabolic lenses. Applications of kinoform lenses are considered and potentials of X-ray lithography for creation new versions of refractive focusing devices are discussed.

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Leonid Shabel'nikov, Vladimir Nazmov, Franz Josef Pantenburg, Juergen Mohr, Volker Saile, Vecheslav Yunkin, Sergey Kouznetsov, Valery F. Pindyurin, Irina Snigireva, and Anatoly A. Snigirev "X-ray lens with kinoform refractive profile created by x-ray lithography", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.455688

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