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Proceedings Article

3D microfabrication in photosensitive glass by femtosecond laser

[+] Author Affiliations
Masashi Masuda

Institute of Physical and Chemical Research (RIKEN) (Japan) and Tokyo Univ. of Science (Japan)

Koji Sugioka, Y. Cheng, Katsumi Midorikawa

Institute of Physical and Chemical Research (RIKEN) (Japan)

Naoko Aoki

The Institute of Physical and Chemical Research (RIKEN) (Japan) and Tokyo Univ. of Science (Japan)

Masako Kawachi, Kazuhiko Shihoyama

HOYA Continuum Corp. (Japan)

Koichi Toyoda

Tokyo Univ. of Science (Japan)

Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, 576 (February 21, 2003); doi:10.1117/12.486548
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From Conference Volume 4830

  • Third International Symposium on Laser Precision Microfabrication
  • Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian
  • Osaka, Japan | May 27, 2002

abstract

We describe a true three dimensional (3D) microfabrication of photosensitive glass by applying a femtosecond (fs) laser which works at fundamental wavelength. First, designed microstructure was written into the glass sample by a tightly focused fs laser beam (wavelength 775nm, pulse width 145±5fs, repetition rate 1kHz); next, this sample underwent a programmed heat treatment; finally it was immersed into 10% hydrofluoric (HF) acid to take an ultrasonic bath. By this approach, true 3D microstructures with embedded microchannels and microcells are directly formed inside the glass matrix, without extra bonding or adhering procedures in those planar fabrication techniques. Such an approach combines the advantages of high precision in laser microfabrication and cost-effectiveness in chemical processing, therefore, could be a promising tool in futuristic manufacture of micro total analysis systems (μ-TAS) and micro fluidic devices.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Masashi Masuda ; Koji Sugioka ; Y. Cheng ; Naoko Aoki ; Masako Kawachi, et al.
"3D microfabrication in photosensitive glass by femtosecond laser", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, 576 (February 21, 2003); doi:10.1117/12.486548; http://dx.doi.org/10.1117/12.486548


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