Application of melt ejection criterion in simulation of micromachining with laser

Vladimir V. Semak; J. T. Schriempf; G. A. Knorovsky; D. O. MacCallum

doi:10.1117/12.478610

17 October 2003 Application of melt ejection criterion in simulation of micromachining with laser

Vladimir V. Semak, J. T. Schriempf, G. A. Knorovsky, D. O. MacCallum

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.478610
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

The theoretical criterion defining the threshold pulse energy and beam intensity required for melt ejection is proposed. The results of numerical simulation present dependencies of the threshold pulse energy and beam intensity as functions of laser pulse duration and beam radius. The experimental verification of proposed criterion is described and the comparison of theoretical predictions and measurements is presented. The criterion is applied for simulation of laser drilling metal foil with thickness in the range 25 μm - 125 μm using laser beam with 12 μm beam radius and pulse durations 10 ns and 100 ns. The computational results are used to interpret the results of experimental study of laser drilling of 125 μm aluminum foil using a single mode beam of a XeCl laser performed at the Nederlands Centrum voor Laser Research (NCLR) and the University of Twente. Additional results on Nd:YAG spot welds in pure Ni are also presented.

Citation Download Citation

Vladimir V. Semak, J. T. Schriempf, G. A. Knorovsky, and D. O. MacCallum "Application of melt ejection criterion in simulation of micromachining with laser", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.478610

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