Quartz substrate infrared photonic crystal

Khosrow Ghadiri; Jalel Rejeb; Vladimir N. Vitchev

doi:10.1117/12.472809

15 January 2003 Quartz substrate infrared photonic crystal

Khosrow Ghadiri, Jalel Rejeb, Vladimir N. Vitchev

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.472809
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper presents the fabrication of a planar photonic crystal (p²c) made of a square array of dielectric rods embedded in air, operating in the infrared spectrum. A quartz substrate is employed instead of the commonly used silicon or column III-V substrate. Our square structure has a normalized cylinder radius-to-pitch ratio of r/a = 0.248 and dielectric material contrast ε_r of 4.5. We choose a Z-cut synthetic quartz for its cut (geometry), and etching properties. Then a particular Z-axis etching process is employed in order to ensure the sharp-edged verticality of the rods and fast etching speed. We also present the computer simulations that allowed the establishment of the photonic band gaps (PBG) of our photonic crystal, as well as the actual measurements. An experimental measurement have been carried out and compared with different simulations. It was found that experimental results are in good agreement with different simulation results. Finally, a frequency selective device for optical communication based on the introduction of impurity sites in the photonic crystal is presented. With our proposed structure Optical System on a Chip (OsoC) with micro-cavity based active devices such as lasers, diodes, modulators, couplers, frequency selective emitters, add-drop filters, detectors, mux/demuxes and polarizers connected by passive waveguide links can be realized.

Citation Download Citation

Khosrow Ghadiri, Jalel Rejeb, and Vladimir N. Vitchev "Quartz substrate infrared photonic crystal", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.472809

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