Continuously tunable air-gap microcavity devices for optical communication systems

Juergen Daleiden; Soeren Irmer; Edwin Ataro; Cornelia Prott; Ventzeslav Rangelov; Friedhard Roemer; Martin Strassner; Amer Tarraf; Hartmut Hillmer

doi:10.1117/12.455562

4 December 2002 Continuously tunable air gap micro-cavity devices for optical communication systems

Juergen Daleiden, Soeren Irmer, Edwin Ataro, Cornelia Prott, Ventzeslav Rangelov, Friedhard Roemer, Martin Strassner, Amer Tarraf, Hartmut Hillmer

Author Affiliations +

Proceedings Volume 4871, Semiconductor Lasers and Optical Amplifiers for Lightwave Communication Systems; (2002) https://doi.org/10.1117/12.455562
Event: ITCom 2002: The Convergence of Information Technologies and Communications, 2002, Boston, MA, United States

Abstract

We present ultra-widely tunable micro-cavity devices realized by micro-opto-electro-mechanical system (MOEMS) technology. We modeled, fabricated and characterized 1.55μm micromachined optical filter and VCSEL devices capable of wide, monotonic and kink-free tuning by a single control parameter. Our vertical cavity devices comprise single or multiple horizontal air-gaps in the dielectric and InP-based material system. Distributed Bragg mirrors with multiple air-gaps are implemented. Due to the high refractive index contrast between air (n=1) and InP (n=3.17) only 3 periods are sufficient to guarantee a reflectivity exceeding 99.8% and offer an enormous stop-band width exceeding 500nm. Unlike InGaAsP/InP or dielectric mirrors they ensure short penetration depth of the optical intensity field in the mirrors and low absorption values. Stress control of the suspended membrane layers is of outmost importance for the fabrication of MOEMS devices. By controlling the stress we are able to fabricate InP membranes which are extremely thin (357nm thickness) and at the same time flat (radius of curvature above 5mm). Micromechanical single parametric actuation is achieved by both, thermal and electrostatic actuation. Filter devices with a record tuning over 127nm with 7.3V are presented.

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Juergen Daleiden, Soeren Irmer, Edwin Ataro, Cornelia Prott, Ventzeslav Rangelov, Friedhard Roemer, Martin Strassner, Amer Tarraf, and Hartmut Hillmer "Continuously tunable air gap micro-cavity devices for optical communication systems", Proc. SPIE 4871, Semiconductor Lasers and Optical Amplifiers for Lightwave Communication Systems, (4 December 2002); https://doi.org/10.1117/12.455562

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