Investigation of hard magnetic silicone elastomer thin films

Zhongmei Yao; Ji Fang; Jackie C. Chen; Weisong Wang

doi:10.1117/12.478159

17 January 2003 Investigation of hard magnetic silicone elastomer thin films

Zhongmei Yao, Ji Fang, Jackie C. Chen, Weisong Wang

Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478159
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The hard magnetic materials with a high remnant magnetic moment, Mr, have the unique advantages that can achieve bi-directional (push-pull) movement in an external magnetic field. This paper presents the results on fabrication and testing of the novel hard magnetic silicone elastomer thin films. The micro-size hard ferrite powder, NdFeB powder and different silicone elastomers have been used to fabricate the various large elongation hard magnetic thin films. The uniform thin films range from 40 μm to 216 μm and they are successfully fabricated. Three different fabrication processing have been investigated and the mechanical properties, like Young’s modulus and deflection force, have been evaluated. The simulation results with ANSYS match the experimental data. In comparison to electrostatic or piezoelectric actuation, the magnetic actuation can provide stronger forces and larger deflections. The large elongation hard magnetic thin film provides an excellent diaphragm material, which plays an important role in the micro pump or valve. This film movement has been tested in the external magnetic field, and proved to have large deflections and high performances.

Citation Download Citation

Zhongmei Yao, Ji Fang, Jackie C. Chen, and Weisong Wang "Investigation of hard magnetic silicone elastomer thin films", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478159

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available