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Proceedings Article

Direct laser writing of 3D micro/nanostructures on opaque surfaces

[+] Author Affiliations
Sima Rekštytė, Albertas Žukauskas, Vytautas Purlys, Mangirdas Malinauskas

Vilnius Univ. (Lithuania)

Yuri Gordienko

G. V. Kurdyumov Institute for Metal Physics (Ukraine)

Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843123 (June 1, 2012); doi:10.1117/12.921387
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From Conference Volume 8431

  • Silicon Photonics and Photonic Integrated Circuits III
  • Laurent Vivien; Seppo K. Honkanen; Lorenzo Pavesi; Stefano Pelli
  • Brussels, Belgium | April 16, 2012

abstract

Spectra of fields for applications of polymeric 3D micro/nanostructures is rapidly widening thus demanding the development of versatile precise and efficient fabrication methods that can be used to process a variety of materials and could be implemented to form tiny devices on a variety of surfaces without influencing their structural quality. We present the latest results obtained using laser lithography approach: 3D polymeric structures with submicrometer spatial resolution on different opaque surfaces such as semiconductors (Si) and various metals (Cr, Al, Fe, Ti). The photostructuring was performed using a range of photosensitive materials such as acrylate based AKRE23, acrylated biodegradable PEG-DA-258, epoxy based mr-NIL 6000, hybrid organic-inorganic SZ2080 and Ormocore b59.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Sima Rekštytė ; Albertas Žukauskas ; Vytautas Purlys ; Yuri Gordienko and Mangirdas Malinauskas
"Direct laser writing of 3D micro/nanostructures on opaque surfaces", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843123 (June 1, 2012); doi:10.1117/12.921387; http://dx.doi.org/10.1117/12.921387


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