Direct laser writing of 3D micro/nanostructures on opaque surfaces

Sima Rekštytė; Albertas Žukauskas; Vytautas Purlys; Yuri Gordienko; Mangirdas Malinauskas

doi:10.1117/12.921387

10 May 2012 Direct laser writing of 3D micro/nanostructures on opaque surfaces

Sima Rekštytė, Albertas Žukauskas, Vytautas Purlys, Yuri Gordienko, Mangirdas Malinauskas

Proceedings Volume 8431, Silicon Photonics and Photonic Integrated Circuits III; 843123 (2012) https://doi.org/10.1117/12.921387
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

Spectra of fields for applications of polymeric 3D micro/nanostructures is rapidly widening thus demanding the development of versatile precise and efficient fabrication methods that can be used to process a variety of materials and could be implemented to form tiny devices on a variety of surfaces without influencing their structural quality. We present the latest results obtained using laser lithography approach: 3D polymeric structures with submicrometer spatial resolution on different opaque surfaces such as semiconductors (Si) and various metals (Cr, Al, Fe, Ti). The photostructuring was performed using a range of photosensitive materials such as acrylate based AKRE23, acrylated biodegradable PEG-DA-258, epoxy based mr-NIL 6000, hybrid organic-inorganic SZ2080 and Ormocore b59.

Citation Download Citation

Sima Rekštytė, Albertas Žukauskas, Vytautas Purlys, Yuri Gordienko, and Mangirdas Malinauskas "Direct laser writing of 3D micro/nanostructures on opaque surfaces", Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843123 (10 May 2012); https://doi.org/10.1117/12.921387

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