Modification of thin metal and ceramic films by UV and IR laser radiation

Victor M. Orlovskii; Victor F. Tarasenko; Andrei V. Fedenev; Sergey B. Alekseev; Igor M. Goncharenko; Nikolai N. Koval; Evgenii E. I. Lipatov; Mikhail A. Shulepov; Milan S. Trtica; Biljana M. Gakovic; Ljubica T. Petkovska

doi:10.1117/12.562979

3 May 2004 Modification of thin metal and ceramic films by UV and IR laser radiation

Victor M. Orlovskii, Victor F. Tarasenko, Andrei V. Fedenev, Sergey B. Alekseev, Igor M. Goncharenko, Nikolai N. Koval, Evgenii E. I. Lipatov, Mikhail A. Shulepov, Milan S. Trtica, Biljana M. Gakovic, Ljubica T. Petkovska

Author Affiliations +

Proceedings Volume 5483, Atomic and Molecular Pulsed Lasers V; (2004) https://doi.org/10.1117/12.562979
Event: Atomic and Molecular Pulsed Lasers V, 2003, Tomsk, Russian Federation

Abstract

Investigation of the modes of thin metal and ceramic films (0,3-1 μm) removal from the glass and stainless steel substrate by IR and UV laser radiation has been performed. It is presented that the efficient film destruction and removal occurs due to laser induced thermal strength under laser fluxes of ~0.5 J/cm² not sufficient for phase transformation.

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Victor M. Orlovskii, Victor F. Tarasenko, Andrei V. Fedenev, Sergey B. Alekseev, Igor M. Goncharenko, Nikolai N. Koval, Evgenii E. I. Lipatov, Mikhail A. Shulepov, Milan S. Trtica, Biljana M. Gakovic, and Ljubica T. Petkovska "Modification of thin metal and ceramic films by UV and IR laser radiation", Proc. SPIE 5483, Atomic and Molecular Pulsed Lasers V, (3 May 2004); https://doi.org/10.1117/12.562979

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