Micromechanical properties of AIN, TiN, and AIN/TiN nanostructured multilayer coatings

Faina Muktepavela; Ilze Manika; Larisa Grigorjeva; V. Skvortsova

doi:10.1117/12.515693

8 August 2003 Micromechanical properties of AIN, TiN, and AIN/TiN nanostructured multilayer coatings

Faina Muktepavela, Ilze Manika, Larisa Grigorjeva, V. Skvortsova

Proceedings Volume 5122, Advanced Organic and Inorganic Optical Materials; (2003) https://doi.org/10.1117/12.515693
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Coatings of AlN, TiN and nanostructured multilayer AlN/TiN have been deposited by reactive sputtering on sapphire, tungsten carbide (WC) and stainless steel substrates. The microhardness, adhesion and formation of cracks under indentation tests, were investigated. It was found that the adhesion of coatings on steel was higher, than on WC for all investigated samples. Nanostructured multilayer AlN/TiN films have the best adhesion and fracture toughness both on the hard (WC) and on the soft (stainless steel) substrates if compared with that for AlN and TiN "single layer" coatings. The effect of γ-radiation on mechanical properties of transparent AlN films was investigated. After the exposure of γ-radiation (10⁶ Gy) the microhardness of AlN has increased by 33%. No debonding or destruction of AlN films under irradiation was observed.

Citation Download Citation

Faina Muktepavela, Ilze Manika, Larisa Grigorjeva, and V. Skvortsova "Micromechanical properties of AIN, TiN, and AIN/TiN nanostructured multilayer coatings", Proc. SPIE 5122, Advanced Organic and Inorganic Optical Materials, (8 August 2003); https://doi.org/10.1117/12.515693

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