Three-dimensional micro-topography by Talbot-projected fringes

J. A. Rayas; R. Rodriguez-Vera; Amalia Martinez

doi:10.1117/12.674609

10 February 2006 Three-dimensional micro-topography by Talbot-projected fringes

J. A. Rayas, R. Rodriguez-Vera, Amalia Martinez

Proceedings Volume 6046, Fifth Symposium Optics in Industry; 60461Y (2006) https://doi.org/10.1117/12.674609
Event: Fifth Symposium Optics in Industry, 2005, Santiago De Queretaro, Mexico

Abstract

Implementation of a structured light projection technique for measuring the relief of objects, or object areas, of micrometric size (approximately 500 μm x 500 μm), is described. It is well-known that when a fringe pattern is projected on an object, the fringes are deformed according to the topography of its surface. This deformed fringe pattern is a modulated optical signal that allows us to measure the relief of the object. Through one of the oculars of a stereomicroscope, previously focused on the object under study, the fringe pattern of one the Talbot self-image is projected. The deformed fringe patterns are observed by the other ocular, in which a CCD camera is mounted to digitize them. Digitized fringe patterns are demodulated by means of a second virtual reference grating. As a result, a moire fringe pattern is obtained delivering a wrapped phase map when is digitally processed by means of a phase recover technique. Phase recovery techniques for obtaining the wrapped phase maps are phase-shifting and spatial phase synchronous. Experimental results and the conditions, under which the topography of an object section is determined, are shown. Also, comparisons over quality between the phase recovery techniques are discussed.

Citation Download Citation

J. A. Rayas, R. Rodriguez-Vera, and Amalia Martinez "Three-dimensional micro-topography by Talbot-projected fringes", Proc. SPIE 6046, Fifth Symposium Optics in Industry, 60461Y (10 February 2006); https://doi.org/10.1117/12.674609

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available