Method of surface roughness measurement based on interferometry

Xi Fang Zhang; Zheng Ping Wang; Yang E. Zhang; Li Hui Wang; Yi Min Zhang

doi:10.1117/12.726470

5 March 2007 Method of surface roughness measurement based on interferometry

Xi Fang Zhang, Zheng Ping Wang, Yang E. Zhang, Li Hui Wang, Yi Min Zhang

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 65952F (2007) https://doi.org/10.1117/12.726470
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

A novel method based on interferometry for measurement of fine surface roughness is proposed, designed and completed. The polarization state of the optical beam in one path is changed utilizing a half wave-plate in this design, avoiding the reversibility of the beam in similar systems previously reported, so that the stability of the system is ensured. A quarter-wave plate is used to make the consistency of the polarization states of the coherent light to obtain the better visibility. The absolute measurement values of the surface roughness are achieved using two concentrical beams scanning the surface. The set-up is simple and easy to be realized. Experiment results show that roughness of R_a=0.012&mgr;m is achieved.

Citation Download Citation

Xi Fang Zhang, Zheng Ping Wang, Yang E. Zhang, Li Hui Wang, and Yi Min Zhang "Method of surface roughness measurement based on interferometry", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 65952F (5 March 2007); https://doi.org/10.1117/12.726470

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