A QVGA-size CMOS time-of-flight range image sensor with background light charge draining structure

Takeo Ushinaga; Izhal Abdul Halin; Tomonari Sawada; Shoji Kawahito; Mitsuru Homma; Yasunari Maeda

doi:10.1117/12.642022

26 January 2006 A QVGA-size CMOS time-of-flight range image sensor with background light charge draining structure

Takeo Ushinaga, Izhal Abdul Halin, Tomonari Sawada, Shoji Kawahito, Mitsuru Homma, Yasunari Maeda

Proceedings Volume 6056, Three-Dimensional Image Capture and Applications VII; 605604 (2006) https://doi.org/10.1117/12.642022
Event: Electronic Imaging 2006, 2006, San Jose, California, United States

Abstract

3-D imaging systems can be used in a variety of applications such as in automobile, medicine, robot vision systems, security and so on. Recently many kinds of range finding methods have been proposed for 3-D imaging systems. This paper presents a new type of CMOS range image sensor based on the Time-of-Flight (TOF)principle with a spatial resolution of 336 × 252 (QVGA) and pixels of 15 × 15 μm² size. A pixel structure of the sensor consists of single layer polysilicon gates on thick field oxide and has a function of background light induced charge reduction. The chip was fabricated in a 0.35 μm standard CMOS process with two poly and three metal layers. The presented sensor achieves a minimum range resolution of 2.8cm at framerate of 30fps and the resolution is improved to 4.2mm for 10 frames averaging, which corresponds to 3fps.

Citation Download Citation

Takeo Ushinaga, Izhal Abdul Halin, Tomonari Sawada, Shoji Kawahito, Mitsuru Homma, and Yasunari Maeda "A QVGA-size CMOS time-of-flight range image sensor with background light charge draining structure", Proc. SPIE 6056, Three-Dimensional Image Capture and Applications VII, 605604 (26 January 2006); https://doi.org/10.1117/12.642022

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