New techniques for the measurement of x-ray beam or x-ray optics quality

Philippe Zeitoun; Philippe Balcou; Samuel Bucourt; Djamel Benredjem; Franck Delmotte; Guillaume Dovillaire; Denis Douillet; James Dunn; G. Faivre; Marta Fajardo; Kenneth A. Goldberg; Mourad Idir; Sebastien Hubert; Jim Hunter; Sylvie Jacquemot; Sophie Kazamias; Sebastien le Pape; Xavier Levecq; Ciaran L. S. Lewis; Remy Marmoret; Pascal Mercere; A. S. Morlens; Patrick P. Naulleau; Christian Remond; Jorge J. Rocca; Stephane Sebban; Raymond F. Smith; Marie-Francoise Ravet; Philippe Troussel; Constance Valentin; Laurent Vanbostal

doi:10.1117/12.508183

19 December 2003 New techniques for the measurement of x-ray beam or x-ray optics quality

Philippe Zeitoun, Philippe Balcou, Samuel Bucourt, Djamel Benredjem, Franck Delmotte, Guillaume Dovillaire, Denis Douillet, James Dunn, G. Faivre, Marta Fajardo, Kenneth A. Goldberg, Mourad Idir, Sebastien Hubert, Jim Hunter, Sylvie Jacquemot, Sophie Kazamias, Sebastien le Pape, Xavier Levecq, Ciaran L. S. Lewis, Remy Marmoret, Pascal Mercere, A. S. Morlens, Patrick P. Naulleau, Christian Remond, Jorge J. Rocca, Stephane Sebban, Raymond F. Smith, Marie-Francoise Ravet, Philippe Troussel, Constance Valentin, Laurent Vanbostal

Author Affiliations +

Proceedings Volume 5197, Soft X-Ray Lasers and Applications V; (2003) https://doi.org/10.1117/12.508183
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Metrology of XUV beams and more specifically X-ray laser (XRL) beam is of crucial importance for development of applications. We have then developed several new optical systems enabling to measure the x-ray laser optical properties. By use of a Michelson interferometer working as a Fourier-Transform spectrometer, the line shapes of different x-ray lasers have been measured with an unprecedented accuracy (δλ/λ~10^-6). Achievement of the first XUV wavefront sensor has enable to measure the beam quality of laser-pumped as well as discharge pumped x-ray lasers. Capillary discharge XRL has demonstrated a very good wavefront allowing to achieve intensity as high 3*10¹⁴ Wcm^-2by focusing with a f = 5 cm mirror. The measured sensor accuracy is as good as λ/120 at 13 nm. Commercial developments are under way.

Citation Download Citation

Philippe Zeitoun, Philippe Balcou, Samuel Bucourt, Djamel Benredjem, Franck Delmotte, Guillaume Dovillaire, Denis Douillet, James Dunn, G. Faivre, Marta Fajardo, Kenneth A. Goldberg, Mourad Idir, Sebastien Hubert, Jim Hunter, Sylvie Jacquemot, Sophie Kazamias, Sebastien le Pape, Xavier Levecq, Ciaran L. S. Lewis, Remy Marmoret, Pascal Mercere, A. S. Morlens, Patrick P. Naulleau, Christian Remond, Jorge J. Rocca, Stephane Sebban, Raymond F. Smith, Marie-Francoise Ravet, Philippe Troussel, Constance Valentin, and Laurent Vanbostal "New techniques for the measurement of x-ray beam or x-ray optics quality", Proc. SPIE 5197, Soft X-Ray Lasers and Applications V, (19 December 2003); https://doi.org/10.1117/12.508183

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