Paper
16 February 2004 Process and design of a multilayer thin film encapsulation of passive matrix OLED displays
Lorenza L. Moro, Todd A. Krajewski, Nicole M. Rutherford, Olga Philips, Robert J. Visser, Mark E. Gross, Wendy D. Bennett, Gordon L. Graff
Author Affiliations +
Abstract
Thin film barrier coatings for protecting Organic Light Emitting Diode (OLED) displays against the environment are extremely difficult to fabricate. The coatings must have extremely low water/oxygen permeability, no defects, cover several microns of topography, and be applied at temperatures below 100°C in a process that does not compromise the performance of the display. Vitex Systems has succeeded in depositing such coatings using an organic/inorganic, thin film multilayer structure termed Barix encapsulation. In this paper results on encapsulation of OLED test pixels and passive matrix displays will be shown. Lifetime and permeability tests conducted at high temperature and humidity demonstrate that this thin film coating can meet the necessary performance requirements for commercial OLED displays. Processing parameters, layer architecture and manufacturing techniques are analyzed and discussed. Thin film encapsulated displays are used to demonstrate the utility of the encapsulation technique.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lorenza L. Moro, Todd A. Krajewski, Nicole M. Rutherford, Olga Philips, Robert J. Visser, Mark E. Gross, Wendy D. Bennett, and Gordon L. Graff "Process and design of a multilayer thin film encapsulation of passive matrix OLED displays", Proc. SPIE 5214, Organic Light-Emitting Materials and Devices VII, (16 February 2004); https://doi.org/10.1117/12.506549
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CITATIONS
Cited by 48 scholarly publications and 7 patents.
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KEYWORDS
Organic light emitting diodes

Calcium

Thin films

Polymers

Oxides

Thin film coatings

Diffusion

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