Packaging and characteristics of a microfluorescence spectroscopy analyzer

J. Lo; Q. Fang; W. Pang; T. Papaioannou; Q. Shui; E. S. Kim; M. A. Gundersen; L. Marcu

doi:10.1117/12.649297

25 February 2006 Packaging and characteristics of a microfluorescence spectroscopy analyzer

J. Lo, Q. Fang, W. Pang, T. Papaioannou, Q. Shui, E. S. Kim, M. A. Gundersen, L. Marcu

Proceedings Volume 6080, Advanced Biomedical and Clinical Diagnostic Systems IV; 60800H (2006) https://doi.org/10.1117/12.649297
Event: SPIE BiOS, 2006, San Jose, California, United States

Abstract

The overall objective this work is the development of a miniaturized fluorescence spectroscopy analyzer realized via microfabrication technology. Previously, we reported a MEMS micro grating actuated by a piezoelectric cantilever. For such device to be used in a spectroscopic system, optical characterization of the grating's efficiency and the system's stray light are required. We report here the characterization of the grating cantilever with a MEMS micro lens with the intention of fitting into a packaged micro spectroscopic system. This packaging is accomplished by multi-wafer (silicon) bonding of strategically aligned crystalline planes in order to form the basic geometry of a miniaturized spectroscopy setup. One of these crystalline planes, <111> of silicon, is used as a mirror for folding and compacting the optics at the specific angle of 54.74° (with wafer plane normal). The packaging, microlens, and grating cantilever are position in the designed geometry to accept a self-aligned fiber input from a flash lamp source. The microlens component is presented with beam profilometry of its focusing at a focal length of 7.7 mm. The diffraction is interrogated by a monochromator for quantifying the above said characteristics. The relative efficiency of the grating was 40-70% in the 400-600 nm range. Together these characterized components define the geometry and performance of our micro fluorescence spectroscopy system.

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J. Lo, Q. Fang, W. Pang, T. Papaioannou, Q. Shui, E. S. Kim, M. A. Gundersen, and L. Marcu "Packaging and characteristics of a microfluorescence spectroscopy analyzer", Proc. SPIE 6080, Advanced Biomedical and Clinical Diagnostic Systems IV, 60800H (25 February 2006); https://doi.org/10.1117/12.649297

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KEYWORDS

Packaging

Microelectromechanical systems

Sensors

Silicon

Mirrors

Diffraction gratings

Spectroscopy

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