Vertical scanning interferometry with a mixed-coherence light source

Gabor Molnar; Rainer Tutsch

doi:10.1117/12.725108

18 June 2007 Vertical scanning interferometry with a mixed-coherence light source

Gabor Molnar, Rainer Tutsch

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 661608 (2007) https://doi.org/10.1117/12.725108
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Micro interferometers are powerful optical instruments for 3D-surface metrology that usually adopt one of two different concepts for the data acquisition: the Phase Shifting Interferometry (PSI) and the Vertical Scanning Interferometry (VSI). In our approach we generate an illumination with mixed coherence characteristics by superposition of light beams from a broadband incandescent lamp and from a laser source. With a novel data evaluation technique we are able to obtain with a single vertical scan a surface profile that has the resolution and the accuracy of PSI and the measurement range of VSI. As an example, we present a surface that has a step of about 1,3&mgr;m and a shallow hole of about 0.1&mgr;m depth that could be entirely surveyed in a single vertical scan.

Citation Download Citation

Gabor Molnar and Rainer Tutsch "Vertical scanning interferometry with a mixed-coherence light source", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661608 (18 June 2007); https://doi.org/10.1117/12.725108

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