Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering

K. J. Yi; Y. F. Lu; H. Ling

doi:10.1117/12.644974

23 February 2006 Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering

K. J. Yi, Y. F. Lu, H. Ling

Proceedings Volume 6107, Laser-based Micropackaging; 61070O (2006) https://doi.org/10.1117/12.644974
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

We report an apparatus designed to characterize two-dimensional (2D) surfaces of carbon films based on the principle of inelastic light scattering (Raman scattering). The design and construction details are presented. The system with a backscattering configuration, is constructed using a high power argon ion laser with a wavelength of 514.5 nm, an XYZ motorized stage with a step resolution of 3.175 μm, a microscope objective lens, a confocal spatial filter and a holographic notch filter, to achieve extremely low crosstalk and maximum resolution in spectroscopy. The radial resolution for film surface is much enhanced by confocal spatial filter due to its stray light suppression capability. A large depth of sampling field is achieved using an objective lens with a middle NA of 0.55 and a long working distance of 8 mm, thus the requirement of using auto-focusing can be avoided. A specific algorithm is designed to decide the film boundaries as well as the outline of surface structures from pre-defined spectral windows. Control software on Labview^TM platform has been developed for controlling movement of the sample stage, spectral acquisition and data visualization. Single-walled carbon nanotubes (SWCNTs) and patterned silicon were used to evaluate the sensitivity, 1D profile and 2D mapping functionality of the designed system. Diamond-like amorphous carbon (DLC) films prepared by pulsed-laser deposition (PLD) were studied using the developed instrument. The results from this approach are compared with those using general scanning tunneling microscope (STM). This comparable low-cost system with high performance is suitable to characterize semiconductors and other materials both for industrial applications and academic research.

Citation Download Citation

K. J. Yi, Y. F. Lu, and H. Ling "Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering", Proc. SPIE 6107, Laser-based Micropackaging, 61070O (23 February 2006); https://doi.org/10.1117/12.644974

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