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Proceedings Article

Correction of high spatial frequency errors on optical surfaces by means of ion beam figuring

[+] Author Affiliations
M. Ghigo, D. Spiga

INAF-Osservatorio Astronomico di Brera (Italy)

R. Canestrari

INAF-Osservatorio Astronomico di Brera (Italy) and Univ. degli Studi dell’Insubria (Italy)

A. Novi

Galileo Avionica (Italy)

Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667114 (September 14, 2007); doi:10.1117/12.734273
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From Conference Volume 6671

  • Optical Manufacturing and Testing VII
  • James H. Burge; Oliver W. Faehnle; Ray Williamson
  • San Diego, CA | August 26, 2007


The Ion Beam Figuring is a well known technique able to correct shape errors on optical surfaces with high accuracy. The size of the ion beam dictates strongly the higher spatial frequencies that can be corrected on the optical surface. The correction of small optics of some cm in diameter or containing high spatial frequencies can be very time consuming or impossible. A system that permits the Ion Beam Figuring of small optical components has been developed in the Astronomical Observatory of Brera (INAF-OAB). It has a small ion beam size and large removal rate. The system employs a concentrator able to force the broader beam emitted from an ion source into a smaller spot having large removal rate. The concentrator is placed between the ion source and the optical surface to be figured and doesn't influence the long term stability of the source. It consists of a conical cavity in which is injected the beam extracted from the grids of the source. The grazing incidence angle of impact of the ions with the walls of the cone ensure a very low level of sputtering of the cone material and meanwhile permits the creation of a very small spot removal function having large removal rate. To demonstrate its functionality a number of test optics has been figured using this system with very good results.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

M. Ghigo ; R. Canestrari ; D. Spiga and A. Novi
"Correction of high spatial frequency errors on optical surfaces by means of ion beam figuring", Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667114 (September 14, 2007); doi:10.1117/12.734273; http://dx.doi.org/10.1117/12.734273

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