Lithography in UV photoresist using NSOM

Y. Lin; Ming Hui Hong; Weijie J. Wang; Y. Z. Law; Tow Chong Chong

doi:10.1117/12.595859

8 October 2004 Lithography in UV photoresist using NSOM

Y. Lin, Ming Hui Hong, Weijie J. Wang, Y. Z. Law, Tow Chong Chong

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.595859
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

The increasing demand for smaller devices as well as research into novel structures for high density data storage has necessitated the use of advanced nanolithography techniques for fabrication in the sub-100 nm regime. In this paper, nanoscale lines with a minimum full width at half maximum of 20 nm have been achieved, demonstrating resolution of λ/20. Lithography was made by near field scanning microscope (NSOM) in UV photoresist with 120 nm thickness. Second harmonic generation of femtosecond laser was used as light source of NSOM. The lithography results were measured and analyzed by the same tip of NSOM and scanning electron microscopy (SEM). The size of tip aperture used was about 50 nm. The effects of laser energy and writing speed on the size and depth of lines drawn were studied. By controlling these parameters properly, high quality nano-patterning in photoresist would be achieved. The nano-patterning technique will have potential applications in nanodevice fabrication and data storage.

Citation Download Citation

Y. Lin, Ming Hui Hong, Weijie J. Wang, Y. Z. Law, and Tow Chong Chong "Lithography in UV photoresist using NSOM", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.595859

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available