Laser microfabrication of three-dimensional photonic crystal templates in polymers

Vygantas Mizeikis; Kock Khuen Seet; Saulius Juodkazis; Hiroaki Misawa

doi:10.1117/12.595880

8 October 2004 Laser microfabrication of three-dimensional photonic crystal templates in polymers

Vygantas Mizeikis, Kock Khuen Seet, Saulius Juodkazis, Hiroaki Misawa

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.595880
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Three-dimensional woodpile photonic crystal structures were recorded in films of polymeric photoresists polymethylcrylate (PMMA) and SU-8 films by femtosecond laser microfabrication technique. The fabricated structures consist of periodic arrays of extended elliptical void-channels in PMMA, and of solid elliptical rods of cross-linked polymer in SU-8. Their lattice periods of several micrometers and typical sub-micrometric feature sizes allowed to confirm presence of pronounced photonic stop-bands at infrared wavelengths around 2.0 - 8.0 μm.

Citation Download Citation

Vygantas Mizeikis, Kock Khuen Seet, Saulius Juodkazis, and Hiroaki Misawa "Laser microfabrication of three-dimensional photonic crystal templates in polymers", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.595880

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