The influence of physical characteristics on ablation effects in UV laser assisted micro engineering

Andreas Ostendorf; Christian J. Kulik; Thorsten Temme; Frank Otte; Katja Samm

doi:10.1117/12.596754

8 October 2004 The influence of physical characteristics on ablation effects in UV laser assisted micro-engineering

Andreas Ostendorf, Christian J. Kulik, Thorsten Temme, Frank Otte, Katja Samm

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596754
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

The development of the recent years led to an increased importance of frequency-converted diode-pumped solid-state lasers (DPSSL) for industrial drilling, cutting and structuring applications. The UV laser systems show favorable beam absorption in a broad range of MEMS and MOEMS relevant materials like ceramics, metals and polymers. Their short pulses in the range of t_H = 20 nanoseconds and the excellent beam quality offer the possibility of manufacturing with a minimum heat affected zone (HAZ) in the surrounding material and thereby a decreasing of initial fusing and debris. To obtain the reachable ablation quality, especially on metals, in this paper copper, tungsten, tantalum, molybdenum, nickel, iron, aluminum and titanium were machined under identical conditions. Material properties like heat conductivity, optical and thermal penetration depth, are decisive for the magnitude of the mentioned side-effects. The correlation of these physical values of different metals to those effects is the subject of this paper. Results of systematically accomplished experiences using a frequency tripled DPSSL with a wavelength of λ = 355 nm in order to investigate this correlation are presented. Due to thermal effects, the ablation quality of metals differ from each other extremely. These information enable a prediction of the reachable quality of the desired structure.

Citation Download Citation

Andreas Ostendorf, Christian J. Kulik, Thorsten Temme, Frank Otte, and Katja Samm "The influence of physical characteristics on ablation effects in UV laser assisted micro-engineering", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596754

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