Digital realization of precision surface defect evaluation system

Fengquan Wang; Yongying Yang; Dandan Sun; Liming Yang; Ruijie Li

doi:10.1117/12.677979

19 May 2006 Digital realization of precision surface defect evaluation system

Fengquan Wang, Yongying Yang, Dandan Sun, Liming Yang, Ruijie Li

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61500F (2006) https://doi.org/10.1117/12.677979
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The automatic inspection of surface imperfections of precise elements is a durable problem expected to be solved. These goals require the use of objective methods to automatic inspection of surface imperfections. Based on the defects image which are light in dark background in scattering imaging system, a complete digital evaluation system of surface imperfections, is presented in this paper. Using the XY- scanning system to detect sub-aperture, digital image could be stitched based on isometric serial images. Implementing binary image segmentation and marginal test, feature extraction by using erosion and dilation algorithm was studied. In this system, the lateral resolution is approximately 1μm. The results provide theoretical and practical evidence to establish the precise surface imperfections evaluation system.

Citation Download Citation

Fengquan Wang, Yongying Yang, Dandan Sun, Liming Yang, and Ruijie Li "Digital realization of precision surface defect evaluation system", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500F (19 May 2006); https://doi.org/10.1117/12.677979

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available