Endoscopic optical coherence tomography imaging probe using a MEMS actuator

Jason M. Zara; Joseph A Izatt; Bruce J Oberhardt; Stephen W Smith

doi:10.1117/12.539816

29 July 2004 Endoscopic optical coherence tomography imaging probe using a MEMS actuator

Jason M. Zara, Joseph A Izatt, Bruce J Oberhardt, Stephen W Smith

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.539816
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

Endoscopic optical coherence tomography (EOCT) is a medical imaging technique that uses infrared light delivered via an endoscope to produce high-resolution images of tissue microstructure of the gastrointestinal tract. A key component of an EOCT system is the method used to scan the infrared beam across the tissue surface. We have begun developing electrostatic MEMS micromirror devices for use in EOCT. These devices consist of 1 mm square gold-plated silicon mirrors on polyimide tables that tilt on 3 micron thick torsion hinges. The MEMS actuator used to tilt the mirror, the integrated forces array (IFA) is a thin (2.2 μm) polyimide membrane consisting of hundreds of thousands of deformable capacitors that can produce strains up to 20% and forces equivalent to 13 mg with applied voltages from 30-120 V. Measurements of optical deflections of these devices range from 18° at low frequencies to more than 120° near the resonant frequencies of the structures (30-60 Hz). The support structures, hinges, and actuators are fabricated from polyimide on silicon using photolithography. These electrostatic MEMS micromirrors were inserted into the scanning arm of an OCT imaging system to take in vitro images of porcine tissue and in vivo images of human skin at frame rates from 4-8 Hz. SLA probe tips were designed and fabricated to align the optics of the device and to protect the fragile polyimide devices during endoscopic imaging. In addition, devices are being fabricated that combine the IFA and mirror structures onto a single silicon wafer, reducing fabrication difficulty.

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Jason M. Zara, Joseph A Izatt, Bruce J Oberhardt, and Stephen W Smith "Endoscopic optical coherence tomography imaging probe using a MEMS actuator", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.539816

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KEYWORDS

Optical coherence tomography

Microelectromechanical systems

Actuators

Mirrors

Scanners

Endoscopy

Semiconducting wafers

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