Membrane mirror deformed by electrostatic pressure

Xin-hua Chen; Min-xue Tang; Wei-min Shen

doi:10.1117/12.782939

21 November 2007 Membrane mirror deformed by electrostatic pressure

Xin-hua Chen, Min-xue Tang, Wei-min Shen

Proceedings Volume 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 67210K (2007) https://doi.org/10.1117/12.782939
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

As space technology develops the optical systems with aperture more than 10 meters are needed. Constrained by the system mass and transport ability of launch vehicle, it's impossible to manufacture these optical systems by conventional technology. It is one of the most novel technologies to manufacture large aperture, ultra-lightweight space optical systems by using membrane mirror as the primary mirror. The membrane mirror is made of thin polymer membrane instead of glass, so it is characterized by ultra-lightweight and low cost. Figuring membrane mirror's surface by electrostatic field is one of the most promising methods. This method is based on the elastic mechanics and electrostatic theories. Membrane mirror is deformed by applying electrostatic voltage between membrane and electrodes behind the membrane. A Φ200mm membrane mirror with electrostatic deformation system has been built and this membrane mirror can be pulled from flat mirror to a 17m radius of curvature. It consists of membrane mounting device, electrode pad and high direct current (DC) voltage control system. The deformation of membrane mirror was observed with ZYGO interferometer and the radius of curvature of membrane mirror was measured by Moiré deflectometry.

Citation Download Citation

Xin-hua Chen, Min-xue Tang, and Wei-min Shen "Membrane mirror deformed by electrostatic pressure", Proc. SPIE 6721, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 67210K (21 November 2007); https://doi.org/10.1117/12.782939

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