Development of Xe- and Sn-fueled high-power Z-pinch EUV source aiming at HVM

Yusuke Teramoto; Gohta Niimi; Daiki Yamatani; Yuki Joshima; Kazunori Bessho; Takahiro Shirai; Tetsu Takemura; Toshio Yokota; Hironobu Yabuta; Khokan C. Paul; Kiyoyuki Kabuki; Koji Miyauchi; Mitsuru Ikeuchi; Kazuaki Hotta; Masaki Yoshioka; Hiroto Sato

doi:10.1117/12.657272

24 March 2006 Development of Xe- and Sn-fueled high-power Z-pinch EUV source aiming at HVM

Yusuke Teramoto, Gohta Niimi, Daiki Yamatani, Yuki Joshima, Kazunori Bessho, Takahiro Shirai, Tetsu Takemura, Toshio Yokota, Hironobu Yabuta, Khokan C. Paul, Kiyoyuki Kabuki, Koji Miyauchi, Mitsuru Ikeuchi, Kazuaki Hotta, Masaki Yoshioka, Hiroto Sato

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 615147 (2006) https://doi.org/10.1117/12.657272
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Discharge-produced plasma (DPP) based EUV source is being developed at Gotenba Branch of EUVA Hiratsuka R&D Center. Among the several kinds of discharge scheme, Z-pinch is employed in our source. An all-solid-state magnetic pulse compression (MPC) generator is used to create a Z-pinch plasma. Low inductance MPC generator is capable of producing a pulsed current with over 50 kA of peak amplitude and about 100 ns of pulse duration at 7 kHz of pulse repetition frequency. In order to obtain sufficient output radiation power, tin-containing gas is being used as well as xenon. Due to the high spectral efficiency of tin, demonstrated EUV output power reached 645 W/2πsr within 2% bandwidth around 13.5 nm. A novel scheme of fuel gas supply led to as good output energy stability as xenon can achieve. Using a nested grazing-incidence collector, EUV power at intermediate focus point which is defined as an interface to the exposure tool reached 42 W with 3.3 mm²sr of etendue.

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Yusuke Teramoto, Gohta Niimi, Daiki Yamatani, Yuki Joshima, Kazunori Bessho, Takahiro Shirai, Tetsu Takemura, Toshio Yokota, Hironobu Yabuta, Khokan C. Paul, Kiyoyuki Kabuki, Koji Miyauchi, Mitsuru Ikeuchi, Kazuaki Hotta, Masaki Yoshioka, and Hiroto Sato "Development of Xe- and Sn-fueled high-power Z-pinch EUV source aiming at HVM", Proc. SPIE 6151, Emerging Lithographic Technologies X, 615147 (24 March 2006); https://doi.org/10.1117/12.657272

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