Properties of DC magnetron sputtered indium-tin oxide films with the assistance of tiny H2O vapor at low temperature

Hui Lin; Junsheng Yu; Shuangling Lou; Jun Wang; Yadong Jiang

doi:10.1117/12.783519

20 November 2007 Properties of DC magnetron sputtered indium-tin oxide films with the assistance of tiny H₂O vapor at low temperature

Hui Lin, Junsheng Yu, Shuangling Lou, Jun Wang, Yadong Jiang

Author Affiliations +

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 672243 (2007) https://doi.org/10.1117/12.783519
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

ITO thin films with high optical and electrical performance were prepared by DC magnetron sputtering method with the assistance of tiny H₂O vapor during deposition process. ITO films were deposited in a custom built Sunicel Plus200 DC magnetron sputtering system using argon as the main sputtering gas and a small quantity of H₂O vapor. For the characterization of ITO film properties, film thickness was measured with a step profiler. The 3D-images of the ITO film surface were characterized by an atomic force microscope (AFM). Film square resistivity was estimated by four-point probe method, and optical transparency was measured by a spectrophotometer. The resulting ITO films exhibited high electrical conductivity as well as high optical transparency and smooth surface morphology. The square resistivity was about 50 Ω/square area sputtered at 200 W at the substrate temperature of 100°C on the position of 10 cm from the sputtering source to substrate center. With the introducing of 2×10^-5 Torr H₂O vapor during sputtering process the visible light transmittance of approximately 89% in the visible spectral region was achieved.

Citation Download Citation

Hui Lin, Junsheng Yu, Shuangling Lou, Jun Wang, and Yadong Jiang "Properties of DC magnetron sputtered indium-tin oxide films with the assistance of tiny H₂O vapor at low temperature", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672243 (20 November 2007); https://doi.org/10.1117/12.783519

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