Static and dynamic microdeformable mirror characterization by phase-shifting and time-averaged interferometry

Arnaud Liotard; Sylvaine Muratet; Frédéric Zamkotsian; Jean-Yves Fourniols

doi:10.1117/12.592150

22 January 2005 Static and dynamic microdeformable mirror characterization by phase-shifting and time-averaged interferometry

Arnaud Liotard, Sylvaine Muratet, Frédéric Zamkotsian, Jean-Yves Fourniols

Author Affiliations +

Proceedings Volume 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV; (2005) https://doi.org/10.1117/12.592150
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Since micro deformable mirrors based on Micro-Opto-Electronico-Mechanical Systems (MOEMS) technology would be essential in next generation adaptive optics system, we are designing, realizing, characterizing and modeling this key-component. Actuators and a continuous-membrane micro deformable mirror (3*3 actuators, 600*600 μm²) have been designed in-house and processed by surface micromachining in the Cronos foundry. A dedicated characterization bench has been developed for the complete analysis. This Twyman-Green interferometer allows high in-plane resolution (4 μm) or large field of view (40mm). Out-of-plane measurements are performed with phase-shifting interferometry showing highly repeatable results (standard deviation<5nm). Features such as optical quality or electro-mechanical behavior are extracted from these high precision three-dimensional component maps and FEM can be fitted. Dynamic analysis like vibration mode and cut-off frequency is realized with time-averaged interferometer. The deformable mirror exhibit a 350nm stroke for 35 volts on the central actuator. This limited stroke could be overcome by changing the components material and promising actuators are made with polymers.

Citation Download Citation

Arnaud Liotard, Sylvaine Muratet, Frédéric Zamkotsian, and Jean-Yves Fourniols "Static and dynamic microdeformable mirror characterization by phase-shifting and time-averaged interferometry", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); https://doi.org/10.1117/12.592150

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