Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating

Wen-Jen Liu; Yen-Hsin Cheng; Steven Chen; I-Tsen Lai; Yin-Chieh Lai; Min-Hang Weng; Yung-Hui Shih; Chung-Da Lee

doi:10.1117/12.590065

4 April 2005 Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating

Wen-Jen Liu, Yen-Hsin Cheng, Steven Chen, I-Tsen Lai, Yin-Chieh Lai, Min-Hang Weng, Yung-Hui Shih, Chung-Da Lee

Proceedings Volume 5723, Optical Components and Materials II; (2005) https://doi.org/10.1117/12.590065
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Amorphous silicon SOI-AWG device with 59% extra high refractive index difference (Δ) and the transmission spectrum of AWG's device indicated the insertion loss, crosstalk and side-lobe were lower than -3.5 dB, -25 dB and -45 dB, respectively, by 3D beam propagation method were investigated in this study. The smallest chip size of the whole device is smaller than 4.5 cm x 1.2 cm, and the highest coupling loss of the rib waveguide for single mode fiber was about -1.68 dB. Based on the simulation results, the device will be really fabricated by thin-film deposition, photolithography and dry-etching processes. Optical measurements of amorphous silicon films indicated, the more refractive index of a-Si films indicated possessing less point defects, dangling bonds, voids, and more hydrogen content and silicon nano-crystallized structures. Meanwhile, the more point defects, dangling bonds, silicon nano-crystallized structures, and less voids and hydrogen content result in larger extinction coefficient. Therefore, we adopted the suitable deposition rate and refractive index at 1550nm wavelength were 0.6 nm/s and 3.5012, respectively, to perform real AWG fabrication. From atomic force microscopy (AFM) analysis revealed the increased argon/silane flow rate and RF power wattage, and decreased operating vacuum would increase surface roughness. High-resolution transmission electron microscopy (HRTEM) analysis indicated amorphous silicon films mainly had amorphous structure with few silicon nano-crystallized structures, point defects and voids might affect the value of the refractive index and reliability. The structures of the a-Si films all indicated amorphous structure by x-ray diffraction (XRD) analysis.

Citation Download Citation

Wen-Jen Liu, Yen-Hsin Cheng, Steven Chen, I-Tsen Lai, Yin-Chieh Lai, Min-Hang Weng, Yung-Hui Shih, and Chung-Da Lee "Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating", Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); https://doi.org/10.1117/12.590065

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