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Proceedings Article

Ultra compact optical link made in amorphous silicon waveguide

[+] Author Affiliations
R. Orobtchouk, B. Han, T. Benyattou

Institut National des Sciences Appliquées de Lyon (France)

S. Jeannot

STMicroelectronics (France)

J. M. Fedeli, P. Mur

CEA/LETI (France)

Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (April 20, 2006); doi:10.1117/12.664969
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From Conference Volume 6183

  • Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
  • Giancarlo C. Righini
  • Strasbourg, France | April 03, 2006

abstract

This paper reports about the design, fabrication and experimental passive compact building blocks (μbend of 2 μm radius, Y junction and Multi Mode Interference (MMI) splitter of 2 μm wide and 4.2 μm long) in a amorphous hydrogenated silicon (a-Si:H) based strip waveguide. The cross section of the waveguide is about 0.5 μm wide and 0.2 μm high.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

R. Orobtchouk ; S. Jeannot ; B. Han ; T. Benyattou ; J. M. Fedeli, et al.
"Ultra compact optical link made in amorphous silicon waveguide", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (April 20, 2006); doi:10.1117/12.664969; http://dx.doi.org/10.1117/12.664969


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