Ultra compact optical link made in amorphous silicon waveguide

R. Orobtchouk; S. Jeannot; B. Han; T. Benyattou; J. M. Fedeli; P. Mur

doi:10.1117/12.664969

20 April 2006 Ultra compact optical link made in amorphous silicon waveguide

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, P. Mur

Proceedings Volume 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits; 618304 (2006) https://doi.org/10.1117/12.664969
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper reports about the design, fabrication and experimental passive compact building blocks (μbend of 2 μm radius, Y junction and Multi Mode Interference (MMI) splitter of 2 μm wide and 4.2 μm long) in a amorphous hydrogenated silicon (a-Si:H) based strip waveguide. The cross section of the waveguide is about 0.5 μm wide and 0.2 μm high.

Citation Download Citation

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur "Ultra compact optical link made in amorphous silicon waveguide", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (20 April 2006); https://doi.org/10.1117/12.664969

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