A MEMS based visible-NIR Fourier transform microspectrometer

C. Ataman; H. Urey; S. O. Isikman; A. Wolter

doi:10.1117/12.664781

21 April 2006 A MEMS based visible-NIR Fourier transform microspectrometer

C. Ataman, H. Urey, S. O. Isikman, A. Wolter

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860C (2006) https://doi.org/10.1117/12.664781
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor the 0th order of the diffraction pattern. The spectrum of the source illuminating the gratings is computed by Fourier transforming the 0th order intensity as a function of the optical path difference. The vertical comb actuators have a travel range of 100 μm under atmospheric pressure with 28V excitation, which yields a theoretical spectral resolution of 0.5nm in the visible and better than 5nm in the telecom wavelengths.

Citation Download Citation

C. Ataman, H. Urey, S. O. Isikman, and A. Wolter "A MEMS based visible-NIR Fourier transform microspectrometer", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860C (21 April 2006); https://doi.org/10.1117/12.664781

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