Micromachined IR-source with excellent blackbody like behaviour

W. Konz; J. Hildenbrand; M. Bauersfeld; S. Hartwig; A. Lambrecht; V. Lehmann; J. Wollenstein

doi:10.1117/12.608712

1 July 2005 Micromachined IR-source with excellent blackbody like behaviour (Invited Paper)

W. Konz, J. Hildenbrand, M. Bauersfeld, S. Hartwig, A. Lambrecht, V. Lehmann, J. Wollenstein

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608712
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

There are several micro sized thermal emitters commercially available, but compared with an ideal black body radiator, their emissivity and thus the emitted radiation is moderate. This was the motivation to develop a novel type of micromachined thermal IR-emitters. The main difference compared with common thermal micro emitters is the use of 2D structured bulk silicon. The regular ordered macropores of the emitters are obtained by electrochemical etching of prepatterend silicon substrates. Typical pore diameter of the fabricated photonic-crystal-like structures are in the range of 2.5 μm to 30 μm. The macroporous silicon shows a black-body-like emission profile for a wide wavelength range.

Citation Download Citation

W. Konz, J. Hildenbrand, M. Bauersfeld, S. Hartwig, A. Lambrecht, V. Lehmann, and J. Wollenstein "Micromachined IR-source with excellent blackbody like behaviour (Invited Paper)", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608712

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