Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a
fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in
the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable
advantages in image resolution may accrue from the use of multiple different images of the same scene - requiring a
Previously we reported on the early feasibility of realising such a mask based on polysilicon micr-opto-electromechanical
systems (MOEMS) technology and early results in the visible and near IR bands. This employs interference
effects to modulate incident light - achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an
applied voltage whilst a hysteretic row/column addressing scheme is used to control the state of individual elements.
In this paper we present transmission results from the target mid-IR band (3-5μm), compare them with theory and
describe the scale up from a 3x3 proof-of-concept MOEMS microshutter array to a 560 x 560 element array (2cm x 2cm
chip) with the associated driver electronics and embedded control - including aspects of electronic design, addressing
control and integration. The resultant microsystem represents a core building block to realise much larger reconfigurable
masks using a tiled approach with further integration challenges in the future.© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.