Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior

[+] Author Affiliations
Katie M. Morzinski, Donald T. Gavel, Andrew P. Norton, Daren R. Dillon, Marco R. Reinig

National Science Foundation Ctr. for Adaptive Optics and UCO/Lick Observatory, Univ. of California, Santa Cruz

Proc. SPIE 6888, MEMS Adaptive Optics II, 68880S (February 12, 2008); doi:10.1117/12.773555
Text Size: A A A
From Conference Volume 6888

  • MEMS Adaptive Optics II
  • Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby
  • San Jose, CA | January 19, 2008

abstract

New concepts for astronomical adaptive optics are enabled by use of micro-electrical mechanical systems (MEMS) deformable mirrors (DMs). Unlike traditional DMs now used in astronomical AO systems, MEMS devices are smaller, less expensive, and exhibit extraordinarily repeatable actuation. Consequently, MEMS technology allows for novel configurations, such as multi-object AO, that require open-loop control of multiple DMs. At the UCO/Lick Observatory Laboratory for Adaptive Optics we are pursuing this concept in part by creating a phaseto- voltage model for the MEMS DM. We model the surface deflection approximately by the thin-plate equation. Using this modeling technique, we have achieved open-loop control accuracy in the laboratory to ~13-30 nm surface rms in response to ~1-3 μm peak-to-valley commands, respectively. Next, high-resolution measurements of the displacement between actuator posts are compared to the homogeneous solution of the thin-plate equation, to verify the model's validity. These measurements show that the thin-plate equation seems a plausible approach to modeling deformations of the top surface down to lateral scales of a tenth actuator spacing. Finally, in order to determine the physical lower limit to which our model can be expected to be accurate, we conducted a set of hysteresis experiments with a MEMS. We detect only a sub-nanometer amount of hysteresis of 0.6±0.3 nm surface over a 160-volt loop. This complements our previous stability and position repeatability measurements, showing that MEMS DMs actuate to sub-nanometer precision and are hence controllable in open-loop.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Katie M. Morzinski ; Donald T. Gavel ; Andrew P. Norton ; Daren R. Dillon and Marco R. Reinig
"Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880S (February 12, 2008); doi:10.1117/12.773555; http://dx.doi.org/10.1117/12.773555


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

 

 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.