A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

S. A. Cornelissen; P. A. Bierden; T. G. Bifano

doi:10.1117/12.770620

8 February 2008 A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

S. A. Cornelissen, P. A. Bierden, T. G. Bifano

Proceedings Volume 6888, MEMS Adaptive Optics II; 68880V (2008) https://doi.org/10.1117/12.770620
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

Citation Download Citation

S. A. Cornelissen, P. A. Bierden, and T. G. Bifano "A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880V (8 February 2008); https://doi.org/10.1117/12.770620

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