Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

[+] Author Affiliations
S. A. Cornelissen, P. A. Bierden

Boston Micromachines Corp.

T. G. Bifano

Boston Micromachines Corp. and Boston Univ.

Proc. SPIE 6888, MEMS Adaptive Optics II, 68880V (February 08, 2008); doi:10.1117/12.770620
Text Size: A A A
From Conference Volume 6888

  • MEMS Adaptive Optics II
  • Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby
  • San Jose, CA | January 19, 2008

abstract

This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

S. A. Cornelissen ; P. A. Bierden and T. G. Bifano
"A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880V (February 08, 2008); doi:10.1117/12.770620; http://dx.doi.org/10.1117/12.770620


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.