High performance motion control of the novel optical servo scanning platform

Yea-Chin Yeh; Jia-Yush Yen; Yung-Hao Peng; Jyh-Fa Lee

doi:10.1117/12.616881

1 August 2005 High performance motion control of the novel optical servo scanning platform

Yea-Chin Yeh, Jia-Yush Yen, Yung-Hao Peng, Jyh-Fa Lee

Proceedings Volume 5873, Optical Scanning 2005; (2005) https://doi.org/10.1117/12.616881
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Modern optical systems rely on scanning platform not only to broaden the field of view but also to enhance the viewing resolution. This paper presents a computer aided engineering (CAE) approach to a novel high speed optical scanning platform [1]. By the aid of complete system identification, system dynamics simulation and analysis, the resulted scanning platform is able to comply with high performance motion requirements. The optical scanning platform [1] uses piezoelectric transducers (PZT) with flexure joints. The scanning range of the novel optical scanning platform [1] can reach as wide as ±3.84 mrads after feedback. Different scanning reference demands are scheduled with different controllers in an attempt to achieve enhanced resolutions. For step and scan reference commands, we adopt a modified PID controller to obtain an improved performance over the simple PID controllers. The repeated continuous scanning, on the other hand, uses an iterative learning controller (ILC). The scanning resolutions are 10 μrad and 6.67 μrad in each scanning direction when operated under the modified PID controller and the ILC controller, respectively. Experimental results are provided to show the efficacy of the proposed approach.

Citation Download Citation

Yea-Chin Yeh, Jia-Yush Yen, Yung-Hao Peng, and Jyh-Fa Lee "High performance motion control of the novel optical servo scanning platform", Proc. SPIE 5873, Optical Scanning 2005, (1 August 2005); https://doi.org/10.1117/12.616881

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