Ge photodetectors integrated in Si waveguides

Laurent Vivien; Mathieu Rouvière; Jean-Marc Fédéli; Delphine Marris-Morini; Jean-François Damlencourt; Loubna El Melhaoui; Eric Cassan; Xavier Le Roux; Paul Crozat; Juliette Mangeney; Suzanne Laval

doi:10.1117/12.765701

26 February 2008 Ge photodetectors integrated in Si waveguides

Laurent Vivien, Mathieu Rouvière, Jean-Marc Fédéli, Delphine Marris-Morini, Jean-François Damlencourt, Loubna El Melhaoui, Eric Cassan, Xavier Le Roux, Paul Crozat, Juliette Mangeney, Suzanne Laval

Author Affiliations +

Proceedings Volume 6898, Silicon Photonics III; 689815 (2008) https://doi.org/10.1117/12.765701
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

This paper reports theoretical and experimental investigations of germanium photodetectors integrated in silicon on insulator waveguides for metal-semiconductor-metal (MSM) photodetectors integrated in a slightly etched rib waveguide. Experimental characteristics of germanium on silicon photodetectors have been obtained using time measurements with femtosecond pulses and opto-RF experiments. For MSM structure with 1μm electrode spacing, the measured bandwidth under 6V bias is 25 GHz at 1.55 μm wavelength with a responsivity as high as 1 A/W and the bandwidth reaches 30GHz for 0.7μm electrode spacing under 1V bias.

Citation Download Citation

Laurent Vivien, Mathieu Rouvière, Jean-Marc Fédéli, Delphine Marris-Morini, Jean-François Damlencourt, Loubna El Melhaoui, Eric Cassan, Xavier Le Roux, Paul Crozat, Juliette Mangeney, and Suzanne Laval "Ge photodetectors integrated in Si waveguides", Proc. SPIE 6898, Silicon Photonics III, 689815 (26 February 2008); https://doi.org/10.1117/12.765701

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available