Paper
22 June 2006 Real ability of PTM proved with the near field
Shin Masuhara, Ariyoshi Nakaoki, Takashi Shimouma, Takeshi Yamasaki
Author Affiliations +
Proceedings Volume 6282, Optical Data Storage 2006; 628214 (2006) https://doi.org/10.1117/12.685233
Event: Optical Data Storage 2006, 2006, Montréal, Canada
Abstract
This article will describe a series of experiments we conducted for the purpose of pursuing the resolution limit of the PTM process. Disc samples with different track pitches and different linear densities were prepared through the PTM process. The signal properties of these discs were analyzed with the assistance of a near field readout system. The jitter value was 5.6% at the linear density of 70nm/bit and 0.16μm track pitch, which corresponded to 80GB per 12cm diameter disc. Even at a recording density corresponding to a capacity of 100GB we observed jitter values less than 10%.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shin Masuhara, Ariyoshi Nakaoki, Takashi Shimouma, and Takeshi Yamasaki "Real ability of PTM proved with the near field", Proc. SPIE 6282, Optical Data Storage 2006, 628214 (22 June 2006); https://doi.org/10.1117/12.685233
Lens.org Logo
CITATIONS
Cited by 4 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Near field

Modulation

Near field optics

Signal processing

Photoresist processing

Reflectivity

Scanning electron microscopy

Back to Top