Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Laser-induced nanopatterning, ablation, and plasma spectroscopy in the near-field of an optical fiber tip

[+] Author Affiliations
Johannes Heitz, Thomas Stehrer

Institute of Applied Physics (Austria) and Johannes Kepler Univ. Linz (Austria)

Sergey Yakunin, Dieter Bäuerle

Institute of Applied Physics (Austria)

Gerard Wysocki

Princeton Univ. (USA)

Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311W (April 21, 2009); doi:10.1117/12.816645
Text Size: A A A
From Conference Volume 7131

  • XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
  • Lisboa, Portugal | September 15, 2008

abstract

We combine laser processing and the technique of a scanning near-field optical microscope (SNOM) for realization of laser-patterning on a nanoscale, laser ablation near the fiber tip, and micro-analysis of solid surface samples by laserinduced breakdown spectroscopy (LIBS). We describe an universal SNOM-like setup allowing to produce near-field laser patterns by laser heating and laser ablation, laser-induced breakdown spectroscopy, and atomic force microscope (AFM) topography investigation with the same optical fiber tip, which is used as near-field emitter or as probe. With solid Si and Al samples, three laser processing regimes were observed with increasing laser pulse energy: (1) cone formation (only for Si, smallest features with 500 nm width and 100 nm height), (2) formation of small craters (smallest features with 450 nm width and 250 nm depth), and (3) crater formation with a width of more than 2 μm with emission of evaluable plasma emission line spectra.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Johannes Heitz ; Sergey Yakunin ; Thomas Stehrer ; Gerard Wysocki and Dieter Bäuerle
"Laser-induced nanopatterning, ablation, and plasma spectroscopy in the near-field of an optical fiber tip", Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311W (April 21, 2009); doi:10.1117/12.816645; http://dx.doi.org/10.1117/12.816645


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.