Detection and active stabilization of beams position at a high-resolution laser interferometer

Ondřej Číp; Zdeněk Buchta; Martin Čížek; Radek Šmíd; Josef Lazar

doi:10.1117/12.814533

3 October 2008 Detection and active stabilization of beams position at a high-resolution laser interferometer

Ondřej Číp, Zdeněk Buchta, Martin Čížek, Radek Šmíd, Josef Lazar

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71550X (2008) https://doi.org/10.1117/12.814533
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

In metrology applications of laser interferometers like a scale calibration of capacitive or inductive sensors, strictly linear positioning of the measuring mirror of the interferometer is necessary. It is maintained usually by a stage, which is based on principle of linear guide ways with ball carrier bearings. But possible imperfection of guides of the travel stage can cause deviations of the mirror plane from the right angle to the axis of traveling. Mentioned angle deviations lead to distortion of interference fringes in the output of the interferometer and by other words it causes non-linearity of the interferometer scale. Because the phenomenon is very random for this type of the travel stage the uncertainty of calibration of sensors is higher. In the work we present a method, which eliminates this usual problem by two ways. The first of them utilizes a special configuration of the laser interferometer where possible angle deviation of the mirror plane is compensated by second pass of the laser beam in the measuring arm of the interferometer. The next way is based on continual monitoring of spatial position of laser beams in the interferometer when the measuring mirror is positioned. It works with condition that the mirror can be slightly tilted by piezoelectric actuators in servo-loop mode with respect to detected spatial position.

Citation Download Citation

Ondřej Číp, Zdeněk Buchta, Martin Čížek, Radek Šmíd, and Josef Lazar "Detection and active stabilization of beams position at a high-resolution laser interferometer", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550X (3 October 2008); https://doi.org/10.1117/12.814533

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Interferometers

Mirrors

Sensors

Signal detection

Signal processing

Distortion

Calibration

Show All Keywords

Keywords/Phrases

Search In:

Publication Years